Custom manufactured sapphire wafer carriers that feature uniform thickness and parallelism with hole patterns to fit vacuum hold-down or delamination fixtures are available from Meller Optics, Inc. of Providence, Rhode Island.
Meller Sapphire Wafer Carriers feature Mohs 9 hardness, which is second only to diamond, making them capable of withstanding repeated use and harsh solvents and etchants. Custom fabricated as thin as 0.018” with 1.2 micron uniform thickness and 10 arc-sec. parallelism, they can be perforated with specific hole patterns to fit vacuum hold-down or delamination fixtures.
Superior to quartz and other materials for semiconductor thinning because of their superior mechanical strength and dimensions, Meller Sapphire Wafer Carriers are available in 2” to 6” dia. sizes and can be supplied with reference flats and laser markings. They are ideal for GaAs and other semiconductor devices and help assure consistent part-to-part uniformity.
Meller Sapphire Wafer Carriers are priced according to configuration, size, and quantity. Price quotations are available upon request.