Sapphire Substrates
Sapphire Single Crystal Sapphire substrates are ideal for epitaxial deposition of GaN and other III-V and II-VI thin-films for use in the manufacture of bright blue and green LED's. C-axis [0001] oriented wafers are available in the sizes shown below. One side is highly polished to 1 nm or less and the second side is either fine ground or optically polished. The parts are available in lots of 10 or 25 in cassettes packaged in Class-100 clean room under nitrogen and are EPI ready.
Sapphire Substrates are custom fabricated to order and typically require a 1 week lead time.
| Specifications: | ||
| 50.8mm Dia | 76.2mm Dia | |
| Crystal | Single crystal Sapphire | Single crystal Sapphire |
| Sapphire Purity | >99.9% | >99.9% |
| Orientation | [0001] C-axis, +/- 0.2 deg. | [0001] C-axis, +/- 0.2 deg. |
| Dia. Tol. | +/- 0.25mm, fine grind OD | +/- 0.25mm, fine grind OD |
| Thickness | 0.332 mm | 0.550 mm |
| 0.432 mm | ||
| Thickness Tol. | +/- 0.25mm | +/- 0.25mm |
| Primary Flat | [1120] A-axis +/- 0.3 deg. | [1120] A-axis +/- 0.3 deg. |
| Flat length | 16.0 +/- 1.5mm | 22.0 +/- 1.5mm |
| Front side Surface | EPI polish, (Ra)< or = 1 nm | EPI polish, (Ra)< or = 1 nm |
| Back side Surface | Fine Ground, R max 5-10 um | Fine Ground, R max 5-10 um |
| Optically Polished 80-50 | Optically Polished 80-50 | |
| TTV | < 25 um | < 30 um |
| BOW | < 20 um | < 30 um |
| Laser mark | upon request | upon request |
| Packaging | Vacuum packed cassette, class | Vacuum packed cassette, class |
| 100 clean room, under nitrogen | 100 clean room, under nitrogen | |
| Cleanliness | EPI ready | EPI ready |
Sapphire Substrates are custom fabricated to order and typically require a 1 week lead time. Quantity discounts are available. Contact Us for more information. | ||
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| Catalog No. | Size | Surface | QOH | Order |
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